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Novel materials and processes for advanced CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A. /

Bibliographic Details
Corporate Authors: Symposium N, "Novel Materials and Processes for Advanced CMOS" Boston, Mass., Materials Research Society. Fall Meeting
Other Authors: Gardner, Mark I.
Format: Conference Proceeding Book
Language:English
Published: Warrendale, Pa. : Materials Research Society, [2003]
Series:Materials Research Society symposia proceedings ; v. 745.
Subjects:
Metal oxide semiconductors > Materials > Congresses.
Metal oxide semiconductors, Complementary > Materials > Congresses.
Nanostructured materials > Congresses.
Gate array circuits > Materials > Congresses.
Dielectrics > Congresses.
Description
Item Description:"Papers presented at Symposium N, "Novel Materials and Processes for Advanced CMOS," held ... at the 2002 MRS Fall Meeting"--P. xiii.
Physical Description:xiii, 384 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:1558996826