Novel materials and processes for advanced CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A. /

Bibliographic Details
Corporate Authors:	Symposium N, "Novel Materials and Processes for Advanced CMOS" Boston, Mass., Materials Research Society. Fall Meeting
Other Authors:	Gardner, Mark I.
Format:	Conference Proceeding Book
Language:	English
Published:	Warrendale, Pa. : Materials Research Society, [2003]
Series:	Materials Research Society symposia proceedings ; v. 745.
Subjects:	Metal oxide semiconductors > Materials > Congresses. Metal oxide semiconductors, Complementary > Materials > Congresses. Nanostructured materials > Congresses. Gate array circuits > Materials > Congresses. Dielectrics > Congresses.

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