Cover Image

MOEMS display and imaging systems : 28-29 January 2003, San Jose, California, USA /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology (Organization), Sandia National Laboratories
Other Authors: Urey, Hakan, 1970-
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2003]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 4985.
Subjects:
Microelectromechanical systems > Congresses.
Imaging systems > Design and construction > Congresses.
Scanning systems > Design and construction > Congresses.
Optics, Adaptive > Congresses.
Description
Physical Description:xlii, 306 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819447854