MOEMS display and imaging systems : 28-29 January 2003, San Jose, California, USA /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology (Organization), Sandia National Laboratories
Other Authors:	Urey, Hakan, 1970-
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2003]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 4985.
Subjects:	Microelectromechanical systems > Congresses. Imaging systems > Design and construction > Congresses. Scanning systems > Design and construction > Congresses. Optics, Adaptive > Congresses.

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