Cover Image

MEMS/MOEMS : advances in photonic communications, sensing, metrology, packaging and assembly : 28-29 October 2002, Brugge, Belgium /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, European Optical Society
Other Authors: Behringer, Uwe F. W.
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2003]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 4945.
Subjects:
Microelectromechanical systems > Technological innovations > Congresses.
Optoelectronic devices > Design and construction > Congresses.
Optical communications > Technological innovations > Congresses.
Microelectronic packaging > Technological innovations > Congresses.
Mechatronics > Congresses.
Description
Physical Description:vii, 203 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819447404