MEMS/MOEMS : advances in photonic communications, sensing, metrology, packaging and assembly : 28-29 October 2002, Brugge, Belgium /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, European Optical Society
Other Authors:	Behringer, Uwe F. W.
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2003]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 4945.
Subjects:	Microelectromechanical systems > Technological innovations > Congresses. Optoelectronic devices > Design and construction > Congresses. Optical communications > Technological innovations > Congresses. Microelectronic packaging > Technological innovations > Congresses. Mechatronics > Congresses.

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