Society of Photo-optical Instrumentation Engineers, European Optical Society, & Behringer, U. F. W. (2003). MEMS/MOEMS: Advances in photonic communications, sensing, metrology, packaging and assembly : 28-29 October 2002, Brugge, Belgium. SPIE.
Chicago Style (17th ed.) CitationSociety of Photo-optical Instrumentation Engineers, European Optical Society, and Uwe F. W. Behringer. MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly : 28-29 October 2002, Brugge, Belgium. Bellingham, Washington: SPIE, 2003.
MLA (9th ed.) CitationSociety of Photo-optical Instrumentation Engineers, et al. MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly : 28-29 October 2002, Brugge, Belgium. SPIE, 2003.
Warning: These citations may not always be 100% accurate.