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Nano- and microtechnology : materials, processes, packaging and systems : 16-18 December 2002, Melbourne, Australia /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, RMIT University, Swinburne University of Technology, International Symposium on Smart Materials, Nano-, and Micro-Smart Systems
Other Authors: Sood, Dinesh K., Malshe, Ajay P., Maeda, R. (Ryutaro)
Format: Conference Proceeding Book
Language:English
Published: Bellingham, Washington : SPIE, [2002]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 4936.
Subjects:
Microelectronics > Congresses.
Microelectromechanical systems > Congresses.
Nanotechnology > Congresses.
Mechatronics > Congresses.
Description
Physical Description:xi, 476 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819447315