Nano- and microtechnology : materials, processes, packaging and systems : 16-18 December 2002, Melbourne, Australia /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, RMIT University, Swinburne University of Technology, International Symposium on Smart Materials, Nano-, and Micro-Smart Systems
Other Authors:	Sood, Dinesh K., Malshe, Ajay P., Maeda, R. (Ryutaro)
Format:	Conference Proceeding Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2002]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 4936.
Subjects:	Microelectronics > Congresses. Microelectromechanical systems > Congresses. Nanotechnology > Congresses. Mechatronics > Congresses.

Remote Storage