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Low dielectric constant materials for IC applications /

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Bibliographic Details
Other Authors: Ho, P. S., Leu, J. (Jihperng), 1958-, Lee, Wei William
Format: Book
Language:English
Published: Berlin ; New York : Springer, [2003]
Series:Springer series in advanced microelectronics. 9.
Subjects:
Electric insulators and insulation.
Dielectrics.
Integrated circuits.
Description
Physical Description:xix, 309 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and index.
ISBN:3540678190 (alk. paper)
ISSN:1437-0387 ;