Low dielectric constant materials for IC applications /

Bibliographic Details

Other Authors:	Ho, P. S., Leu, J. (Jihperng), 1958-, Lee, Wei William
Format:	Book
Language:	English
Published:	Berlin ; New York : Springer, [2003]
Series:	Springer series in advanced microelectronics. 9.
Subjects:	Electric insulators and insulation. Dielectrics. Integrated circuits.