Cover Image

SiO2 in Si microdevices /

Bibliographic Details
Main Author: Itsumi, Manabu
Format: Book
Language:English
Published: Tokyo : Berlin ; New York : Kodansha ; Springer, [2002]
Series:Springer series in materials science. 56.
Springer series in materials science ; v. 56.
Subjects:
Integrated circuits > Very large scale integration > Design and construction.
Semiconductors > Materials.
Silica.
Description
Physical Description:xiii, 322 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and index.
ISBN:3540433392 (hc : alk. paper)
4062106671 (Kodansha : hd.bd.)
ISSN:0933-033X ;