SiO2 in Si microdevices /

Bibliographic Details
Main Author:	Itsumi, Manabu
Format:	Book
Language:	English
Published:	Tokyo : Berlin ; New York : Kodansha ; Springer, [2002]
Series:	Springer series in materials science. 56. Springer series in materials science ; v. 56.
Subjects:	Integrated circuits > Very large scale integration > Design and construction. Semiconductors > Materials. Silica.

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