APA (7th ed.) Citation

Itsumi, M. (2002). SiO2 in Si microdevices. Kodansha ; Springer.

Chicago Style (17th ed.) Citation

Itsumi, Manabu. SiO2 in Si Microdevices. Tokyo : Berlin ; New York: Kodansha ; Springer, 2002.

MLA (9th ed.) Citation

Itsumi, Manabu. SiO2 in Si Microdevices. Kodansha ; Springer, 2002.