APA (7th ed.) Citation

Symposium on Photomask Technology Monterey, Calif, BACUS (Technical group), Society of Photo-optical Instrumentation Engineers, Grenon, B. J., & Kimmel, K. R. (2002). 22nd Annual BACUS Symposium on Photomask Technology: 1-4 October 2002, Monterey, California, USA. SPIE.

Chicago Style (17th ed.) Citation

Symposium on Photomask Technology Monterey, Calif, BACUS (Technical group), Society of Photo-optical Instrumentation Engineers, Brian J. Grenon, and Kurt R. Kimmel. 22nd Annual BACUS Symposium on Photomask Technology: 1-4 October 2002, Monterey, California, USA. Bellingham, Washington: SPIE, 2002.

MLA (9th ed.) Citation

Symposium on Photomask Technology Monterey, Calif, et al. 22nd Annual BACUS Symposium on Photomask Technology: 1-4 October 2002, Monterey, California, USA. SPIE, 2002.