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Journal of vacuum science & technology. processing, measurement, and phenomena. B, Microelectronics and nanometer structures :

Bibliographic Details
Previous Title:Journal of vacuum science & technology. B, Microelectronics processing and phenomena (Online)
Uniform Title:Journal of vacuum science & technology.
Corporate Authors: American Vacuum Society, American Institute of Physics
Format: Journal
Language:English
Published: Woodbury, N.Y. : Published for the American Vacuum Society by the American Institute of Physics.
Subjects:
Vacuum technology > Periodicals.
Microelectronics > Periodicals.
Nanostructured materials > Periodicals.
Vide (Technologie) > Périodiques.
Microélectronique > Périodiques.
Matériaux nanocristallins > Périodiques.
Online Availability: Check for online availability
Description
Published:2nd ser., v. 9, no. 1 (Jan./Feb. 1991)-
Item Description:Published: Melville, NY., 2003-
Title from issue HTML table of contents (Scitation site, viewed Sept. 21, 2006).
Latest issue consulted: Volume 24, number 4 (Jul./Aug. 2006) (viewed Sept. 21, 2006).
Electronic resource.
Publication Frequency:Bimonthly
Format:Mode of access: World Wide Web.
ISSN:1520-8567
1071-1023
1071-8028
Related Items:Issued also in print format and on CD-ROM under the title: JVST. A & B.