Journal of vacuum science & technology. processing, measurement, and phenomena. B, Microelectronics and nanometer structures :

Bibliographic Details

Previous Title:	Journal of vacuum science & technology. B, Microelectronics processing and phenomena (Online)
Uniform Title:	Journal of vacuum science & technology.
Corporate Authors:	American Vacuum Society, American Institute of Physics
Format:	Journal
Language:	English
Published:	Woodbury, N.Y. : Published for the American Vacuum Society by the American Institute of Physics.
Subjects:	Vacuum technology > Periodicals. Microelectronics > Periodicals. Nanostructured materials > Periodicals. Vide (Technologie) > Périodiques. Microélectronique > Périodiques. Matériaux nanocristallins > Périodiques.
Online Availability: