Surface scattering and diffraction for advanced metrology II : 9 July 2002, Seattle, Washington, USA /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Boeing Company
Other Authors:	Gu, Zu-Han, Maradudin, Alexei A., 1931-
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2002]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 4780.
Subjects:	Surface roughness > Measurement > Congresses. Diffractive scattering > Congresses. Optical measurements > Congresses. Scattering (Physics) > Congresses. Metrology > Congresses.

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