2002 proceedings : Seventh International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference (CMP-MIC), February 27 - March 1, 2002, Santa Clara Marriott Hotel, Santa Clara, CA, a specialty conference of Microelectronics Institute Inter on-chip Connection.

Bibliographic Details
Corporate Authors:	International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference Santa Clara, Calif., Microelectronics Institute Inter on-chip Connection
Format:	Conference Proceeding Book
Language:	English
Published:	[Tampa, Fla.] : [IMIC Headquarters?], [2002]
Subjects:	Integrated circuits > Ultra large scale integration > Design and construction > Congresses. Integrated circuits > Very large scale integration > Design and construction > Congresses. Grinding and polishing > Congresses.

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