Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May 2002, Cannes, France /

Bibliographic Details
Corporate Author:	Centre national de la recherche scientifique (France)
Other Authors:	Courtois, B. (Bernard)
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2002]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 4755.
Subjects:	Microelectromechanical systems > Congresses. Optoelectronic devices > Congresses. Micromachining > Congresses. Microelectronic packaging > Congresses.

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