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Semiconductors for micro- and nanotechnology : an introduction for engineers /

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Bibliographic Details
Main Author: Korvink, J. G. (Jan G.)
Other Authors: Greiner, Andreas
Format: Book
Language:English
Published: Weinheim : [Great Britain] : Wiley-VCH, [2002]
Subjects:
Semiconductors > Textbooks.
Nanotechnology > Textbooks.
Microtechnology > Textbooks.
Description
Physical Description:340 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and index.
ISBN:3527302573