Semiconductors for micro- and nanotechnology : an introduction for engineers /

Bibliographic Details
Main Author:	Korvink, J. G. (Jan G.)
Other Authors:	Greiner, Andreas
Format:	Book
Language:	English
Published:	Weinheim : [Great Britain] : Wiley-VCH, [2002]
Subjects:	Semiconductors > Textbooks. Nanotechnology > Textbooks. Microtechnology > Textbooks.

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