Cover Image

Advances in resist technology and processing XIX : 4-6 March 2002, Santa Clara, USA /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, International SEMATECH
Other Authors: Fedynyshyn, Theodore H., 1952-
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2002]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 4690.
Subjects:
Photoresists > Congresses.
Microlithography > Congresses.
Description
Physical Description:2 volumes (xlii, 1234 pages) : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819444367