Materials science of microelectromechanical systems (MEMS) devices IV : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A. /

Microelectromechanical systems--materials and devices II : symposium held December 1-2, 2008, Boston, Massachusetts, U.S.A. /
Published: (2009)

Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A. /
Published: (2000)

Nano- and microelectromechanical systems (NEMS and MEMS) and molecular machines : symposium held December 2-4, 2002, Boston, Massachusetts, USA /
Published: (2003)

2001 Microelectromechanical Systems Conference : MEMS 2001 : 24-26 August 2001 Berkeley, California, USA /
Published: (2002)

Smart material systems and MEMS : design and development methodologies /
by: Varadan, V. K., 1943-
Published: (2006)

Mechanics of microelectromechanical systems /
by: Lobontiu, Nicolae
Published: (2005)

Handbook of silicon based MEMS materials and technologies /
Published: (2010)

MEMS materials and processes handbook /
Published: (2010)

Nano- and microelectromechanical systems : fundamentals of nano- and microengineering /
by: Lyshevski, Sergey Edward
Published: (2001)

Introduction to microelectromechanical systems engineering /
by: Maluf, Nadim
Published: (2004)

Photonic MEMS devices : design, fabrication and control /
by: Liu, Ai-Qun
Published: (2009)

Biomaterials for MEMS /
Published: (2011)

Handbook of silicon based MEMS materials and technologies /
Published: (2015)

Analysis and design principles of MEMS devices /
by: Bao, Min-Hang
Published: (2005)

Analysis and design principles of MEMS devices /
by: Bao, Min-Hang
Published: (2005)

Reliability, packaging, testing, and characterization of MEMS/MOEMS IV : 24-25 January 2005, San Jose, California, USA /
Published: (2005)

Materials & process integration for MEMS /
Published: (2002)

MEMS and NEMS : systems, devices, and structures /
by: Lyshevski, Sergey Edward
Published: (2002)

Microsensors, MEMS, and smart devices /
by: Gardner, J. W. (Julian W.), 1958-
Published: (2001)

Silicon carbide microelectromechanical systems for harsh environments /
Published: (2006)

Fundamentals of Microelectromechanical Systems (MEMS) /
by: Kim, Eun Sok
Published: (2021)

Mechanics of microelectromechanical systems /
by: Lobontiu, Nicolae
Published: (2005)

NEMS/MEMS technology and devices : selected peer reviewed papers from the International Conference on Materials for Advanced Technologies 2009, symposium L, 28 June - 3 July, Singapore /
Published: (2009)

Electromechanics and MEMS /
by: Jones, T. B. (Thomas Byron), 1944-
Published: (2013)

Foundations of MEMS /
by: Liu, Chang, Ph.D
Published: (2006)

Principles of microelectromechanical systems /
by: Lee, Ki Bang
Published: (2011)

Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Francisco, USA /
Published: (2001)

Biomaterials for MEMS /
Published: (2011)

Introduction to microelectromechanical systems engineering /
by: Maluf, Nadim
Published: (2004)

MEMS/MOEMS components and their applications IV : 22-23 January 2007, San Jose, California, USA /
Published: (2007)

Handbook of silicon based MEMS materials and technologies /
Published: (2015)

Reliability of MEMS /
Published: (2008)

Reliability of MEMS /
Published: (2008)

MEMs reliability /
by: Hartzell, Allyson L.
Published: (2011)

Microsensors, MEMS, and smart devices /
by: Gardner, J. W. (Julian W.), 1958-
Published: (2001)

Analysis and design principles of MEMS devices /
by: Bao, Min-Hang
Published: (2005)