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Materials science of microelectromechanical systems (MEMS) devices IV : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A. /

Bibliographic Details
Corporate Author: Materials Science of Microelectromechanical Systems (MEMS) Devices Boston, Mass.)
Other Authors: Ayón, Arturo A.
Format: Conference Proceeding Book
Language:English
Published: Warrendale, Pa. : Materials Research Society, [2002]
Series:Materials Research Society symposia proceedings ; v. 687.
Subjects:
Microelectromechanical systems > Materials > Congresses.

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Call Number: TK7875 .M38 2002
 
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TK7875 .M38 2002 Available