Materials science of microelectromechanical systems (MEMS) devices IV : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A. /
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| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Warrendale, Pa. :
Materials Research Society,
[2002]
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| Series: | Materials Research Society symposia proceedings ;
v. 687. |
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| Physical Description: | xi, 318 pages : illustrations ; 24 cm. |
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| Bibliography: | Includes bibliographical references and indexes. |
| ISBN: | 1558996230 |