Materials Science of Microelectromechanical Systems (MEMS) Devices Boston, Mass.), & Ayón, A. A. (2002). Materials science of microelectromechanical systems (MEMS) devices IV: Symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A. Materials Research Society.
Chicago Style (17th ed.) CitationMaterials Science of Microelectromechanical Systems (MEMS) Devices Boston, Mass.), and Arturo A. Ayón. Materials Science of Microelectromechanical Systems (MEMS) Devices IV: Symposium Held November 25-28, 2001, Boston, Massachusetts, U.S.A. Warrendale, Pa.: Materials Research Society, 2002.
MLA (9th ed.) CitationMaterials Science of Microelectromechanical Systems (MEMS) Devices Boston, Mass.), and Arturo A. Ayón. Materials Science of Microelectromechanical Systems (MEMS) Devices IV: Symposium Held November 25-28, 2001, Boston, Massachusetts, U.S.A. Materials Research Society, 2002.