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CMOS cantilever sensor systems : atomic force microscopy and gas sensing applications /

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Bibliographic Details
Main Author: Lange, D. (Dirk), 1970-
Other Authors: Brand, Oliver, 1964-, Baltes, H. (Henry)
Format: Book
Language:English
Published: Berlin ; New York : Springer, [2002]
Series:Microtechnology and MEMS.
Subjects:
Microelectromechanical systems > Design and construction.
Metal oxide semiconductors, Complementary > Design and construction.
Levers > Design and construction.
Atomic force microscopy > Equipment and supplies > Design and construction.
Gas detectors > Design and construction.
Description
Physical Description:viii, 142 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references (pages [131]-140) and index.
ISBN:3540431438 (alk. paper)