CMOS cantilever sensor systems : atomic force microscopy and gas sensing applications /
| Main Author: | |
|---|---|
| Other Authors: | , |
| Format: | Book |
| Language: | English |
| Published: |
Berlin ; New York :
Springer,
[2002]
|
| Series: | Microtechnology and MEMS.
|
| Subjects: |
Remote Storage
| Call Number: |
TK7875 .L36 2002 |
|
|---|---|---|
| Call Number | Status | Get It |
| TK7875 .L36 2002 | Available | |