Nondestructive evaluation and reliability of micro- and nanomaterial systems : 18-19 March 2002, Newport Beach, USA /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Meyendorf, Norbert, Baaklini, George Y., Michel, Bernd
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2002]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 4703.
Subjects:	Nanostructured materials > Testing > Congresses. Microelectromechanical systems > Evaluation. Microelectromechanical systems > Reliability. Nondestructive testing > Congresses. Surfaces (Technology) > Congresses. Quality control > Congresses.

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