Cover Image

Smart structures and materials 2002. Smart electronics, MEMS, and nanotechnology : 18-20 March 2002, San Diego, USA /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, American Society of Mechanical Engineers, United States. Air Force. Office of Scientific Research
Other Authors: Varadan, V. K., 1943-
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2002]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 4700.
Subjects:
Microelectronics > Materials > Congresses.
Smart materials > Congresses.
Microelectromechanical systems > Congresses.
Actuators > Congresses.
Nanotechnology > Congresses.
Description
Item Description:Earlier conferences have subtitle: Smart electronics and MEMS.
Physical Description:viii, 360 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819444480