Smart structures and materials 2002. Smart electronics, MEMS, and nanotechnology : 18-20 March 2002, San Diego, USA /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, American Society of Mechanical Engineers, United States. Air Force. Office of Scientific Research
Other Authors:	Varadan, V. K., 1943-
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2002]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 4700.
Subjects:	Microelectronics > Materials > Congresses. Smart materials > Congresses. Microelectromechanical systems > Congresses. Actuators > Congresses. Nanotechnology > Congresses.

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