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Journal of vacuum science & technology. an official journal of the American Vacuum Society. B, Microelectronics processing and phenomena :

Bibliographic Details
New Title:Journal of vacuum science & technology. B, Microelectronics and nanometer structures
Previous Title:Journal of vacuum science and technology
Corporate Authors: American Vacuum Society, American Institute of Physics
Format: Journal
Language:English
Published: New York, N.Y. : Published for the Society by the American Institute of Physics, 1983-
Subjects:
Vacuum technology > Periodicals.
Vide (Technologie) > Périodiques.
Microélectronique > Périodiques.
Matériaux nanocristallins > Périodiques.
Vacuümtechniek.
Micro-elektronica.
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Description
Published:2nd ser., v. 1, no. 1 (Jan.-Mar. 1983)-2nd ser., v. 8, no. 6 (Nov./Dec. 1990).
Item Description:Title from cover.
Physical Description:8 volumes : illustrations ; 29 cm.
Issued also on microfilm and online.
Publication Frequency:Bimonthly, <Jan./Feb. 1985- >
ISSN:0734-211X
0022-5355
1071-1023
Related Items:Includes: International Symposium on Electron, Ion, and Photon Beams. Proceedings of the ... International Symposium on Electron, Ion, and Photon Beams; and: Molecular Beam Epitaxy Workshop. Proceedings of the ... Molecular Beam Epitaxy Workshop, also issued separately.