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Journal of vacuum science & technology. an official journal of the American Vacuum Society. B, Microelectronics processing and phenomena :

Bibliographic Details
New Title:Journal of vacuum science & technology. B, Microelectronics and nanometer structures
Previous Title:Journal of vacuum science and technology
Corporate Authors: American Vacuum Society, American Institute of Physics
Format: Journal
Language:English
Published: New York, N.Y. : Published for the Society by the American Institute of Physics, 1983-
Subjects:
Vacuum technology > Periodicals.
Vide (Technologie) > Périodiques.
Microélectronique > Périodiques.
Matériaux nanocristallins > Périodiques.
Vacuümtechniek.
Micro-elektronica.
Online Availability: Check for online availability

Evans: Library Stacks

Holdings details from Evans: Library Stacks
Call Number: TJ940 .J673
Library Owns: TJ940 .J673 (2nd ser:v.1-8 (1983-1990))
Call Number Status Get It
TJ940 .J673 v.1:no.3 1983 Available
TJ940 .J673 v.1:no.4 1983 Available
TJ940 .J673 v.2:no.1 1984 Available
TJ940 .J673 v.3:no.1 -v.3:no.3 1985-1985 Available
TJ940 .J673 v.3:no.4 -v.3:no.6 1985-1985 Available
TJ940 .J673 v.4:no.4 -v.4:no.6 1986-1986 Available
TJ940 .J673 v.5:no.1 -v.5:no.3 1987-1987 Available
TJ940 .J673 v.5:no.4 -v.5:no.6 1987-1987 Available
TJ940 .J673 v.6:no.1-v.6:no.2 1988-1988 Available
TJ940 .J673 v.6:no.3-v.6:no.4 1988-1988 Available
TJ940 .J673 v.6:no.5-v.6:no.6 1988-1988 Available
TJ940 .J673 v.7:no.1 -v.7:no.3 1989-1989 Available
TJ940 .J673 v.7:no.4 -v.7:no.5 1989-1989 Available
TJ940 .J673 v.7:no.6 1989 Available
TJ940 .J673 v.8:no.1 -v.8:no.3 1990-1990 Available
TJ940 .J673 v.8:no.4 -v.8:no.5 1990-1990 Available
TJ940 .J673 v.8:no.6 1990 Available