Functional integration of opto-electro-mechanical devices and systems II : 23-24 January 2002, San Jose, USA /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Descour, Michael R., Rantala, Juha
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2002]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 4647.
Subjects:	Microelectromechanical systems > Congresses. Optoelectronic devices > Congresses. Microelectronic packaging > Congresses.

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