Cover Image

Nanostructure science, metrology, and technology : 5-7 September 2001, Gaithersburg, USA /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, National Institute of Standards and Technology (U.S.), United States. Office of Naval Research
Other Authors: Peckerar, Martin Charles, 1946-, Postek, Michael T.
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2002]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 4608.
Subjects:
Nanotechnology > Congresses.
Nanostructures > Congresses.
Metrology > Congresses.
Microelectronics > Congresses.
Description
Item Description:"Sponsored by SPIE-the International Society for Optical Engineering, National Institute of Standards and Technology (USA), Office of Naval Research (USA)."
Physical Description:x, 278 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:0819443476