Society of Photo-optical Instrumentation Engineers, National Institute of Standards and Technology (U.S.), United States. Office of Naval Research, Peckerar, M. C., & Postek, M. T. (2002). Nanostructure science, metrology, and technology: 5-7 September 2001, Gaithersburg, USA. SPIE.
Chicago Style (17th ed.) CitationSociety of Photo-optical Instrumentation Engineers, National Institute of Standards and Technology (U.S.), United States. Office of Naval Research, Martin Charles Peckerar, and Michael T. Postek. Nanostructure Science, Metrology, and Technology: 5-7 September 2001, Gaithersburg, USA. Bellingham, Washington: SPIE, 2002.
MLA (9th ed.) CitationSociety of Photo-optical Instrumentation Engineers, et al. Nanostructure Science, Metrology, and Technology: 5-7 September 2001, Gaithersburg, USA. SPIE, 2002.