Chemical-mechanical polishing 2001 : advantages and future challenges : symposium held April 18-20, 2001, San Francisco, California, U.S.A. /
| Corporate Author: | |
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| Other Authors: | , , |
| Format: | Book |
| Language: | English |
| Published: |
Warrendale, Pa. :
Materials Research Society,
[2001]
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| Series: | Materials Research Society symposia proceedings ;
v. 671. |
| Subjects: |
| Item Description: | "This volume comprises most of the papers that were presented at Symposium M, 'Chemical-Mechanical Polishing 2001--Advances and Future Challenges,' held April 18-20 at the 2001 MRS Spring Meeting in San Francisco, California ..."--Pref. |
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| Physical Description: | 1 volume (various pagings) : illustrations ; 24 cm. |
| Bibliography: | Includes bibliographical references and indexes. |
| ISBN: | 1558996079 |