Chemical-mechanical polishing 2001 : advantages and future challenges : symposium held April 18-20, 2001, San Francisco, California, U.S.A. /

Bibliographic Details
Corporate Author:	Materials Research Society. Fall Meeting
Other Authors:	Babu, S. V., Cadien, Kenneth Charles, 1951-, Yano, Hiroyuki
Format:	Book
Language:	English
Published:	Warrendale, Pa. : Materials Research Society, [2001]
Series:	Materials Research Society symposia proceedings ; v. 671.
Subjects:	Electrolytic polishing > Congresses. Grinding and polishing > Congresses.

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