Materials Research Society. Fall Meeting, Babu, S. V., Cadien, K. C., & Yano, H. (2001). Chemical-mechanical polishing 2001: Advantages and future challenges : symposium held April 18-20, 2001, San Francisco, California, U.S.A. Materials Research Society.
Chicago Style (17th ed.) CitationMaterials Research Society. Fall Meeting, S. V. Babu, Kenneth Charles Cadien, and Hiroyuki Yano. Chemical-mechanical Polishing 2001: Advantages and Future Challenges : Symposium Held April 18-20, 2001, San Francisco, California, U.S.A. Warrendale, Pa.: Materials Research Society, 2001.
MLA (9th ed.) CitationMaterials Research Society. Fall Meeting, et al. Chemical-mechanical Polishing 2001: Advantages and Future Challenges : Symposium Held April 18-20, 2001, San Francisco, California, U.S.A. Materials Research Society, 2001.