APA (7th ed.) Citation

Campbell, S. A. (2002). Gate stack and silicide issues in silicon processing II: Symposium held April 17-19, 2001, San Francisco, California, U.S.A. Materials Research Society.

Chicago Style (17th ed.) Citation

Campbell, S. A. Gate Stack and Silicide Issues in Silicon Processing II: Symposium Held April 17-19, 2001, San Francisco, California, U.S.A. Warrendale, Pa.: Materials Research Society, 2002.

MLA (9th ed.) Citation

Campbell, S. A. Gate Stack and Silicide Issues in Silicon Processing II: Symposium Held April 17-19, 2001, San Francisco, California, U.S.A. Materials Research Society, 2002.