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Chemical physics of thin film deposition processes for micro- and nano-technologies /

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Bibliographic Details
Corporate Authors: NATO Advanced Study Institute on Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies Kaunas, Lithuania, North Atlantic Treaty Organization. Scientific Affairs Division
Other Authors: Pauleau, Y.
Format: Conference Proceeding Book
Language:English
Published: Dordrecht ; Boston : Kluwer Academic Publishers, [2002]
Series:NATO science series. Mathematics, physics, and chemistry ; . 55.
Subjects:
Thin films > Congresses.
Nanotechnology > Congresses.
Description
Item Description:"Published in cooperation with NATO Scientific Affairs Division."
"Proceedings of the NATO Advanced Study Institute on Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies, Kaunas, Lithuania, 3-14 September 2001"--Title page verso.
Physical Description:xiii, 363 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and index.
ISBN:1402005245 (alk. paper)
1402005253 (pbk. : alk. paper)