Chemical physics of thin film deposition processes for micro- and nano-technologies /
| Corporate Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Dordrecht ; Boston :
Kluwer Academic Publishers,
[2002]
|
| Series: | NATO science series. Mathematics, physics, and chemistry ;
. 55. |
| Subjects: |
Evans: Library Stacks
| Call Number: |
TA418.9.T45 C47 2001 |
|
|---|---|---|
| Call Number | Status | Get It |
| TA418.9.T45 C47 2001 | Available | |