APA (7th ed.) Citation

NATO Advanced Study Institute on Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies Kaunas, Lithuania, North Atlantic Treaty Organization. Scientific Affairs Division, & Pauleau, Y. (2002). Chemical physics of thin film deposition processes for micro- and nano-technologies. Kluwer Academic Publishers.

Chicago Style (17th ed.) Citation

NATO Advanced Study Institute on Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies Kaunas, Lithuania, North Atlantic Treaty Organization. Scientific Affairs Division, and Y. Pauleau. Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-technologies. Dordrecht ; Boston: Kluwer Academic Publishers, 2002.

MLA (9th ed.) Citation

NATO Advanced Study Institute on Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies Kaunas, Lithuania, et al. Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-technologies. Kluwer Academic Publishers, 2002.