Silicon wafer bonding technology : for VLSI and MEMS applications /

Bibliographic Details
Corporate Authors:	Institution of Electrical Engineers, INSPEC (Information service). EMIS Group
Other Authors:	Iyer, Subramanian S., Auberton-Hervé, Andre J.
Format:	Book
Language:	English
Published:	London : Institution of Electrical Engineers, [2002]
Series:	EMIS processing series ; no. 1.
Subjects:	Silicon-on-insulator technology. Integrated circuits > Very large scale integration. Microelectromechanical systems.

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