Optical microscanners and microspectrometers using thermal bimorph actuators /
| Main Author: | |
|---|---|
| Other Authors: | , |
| Format: | Thesis Book |
| Language: | English |
| Published: |
Boston, Mass. : London :
Kluwer Academic,
[2002]
|
| Series: | Microsystems (Series) ;
v. 8. |
| Subjects: |
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