Optical microscanners and microspectrometers using thermal bimorph actuators /

Bibliographic Details

Main Author:	Lammel, Gerhard
Other Authors:	Schweizer, Sandra, Renaud, Philippe, Prof
Format:	Thesis Book
Language:	English
Published:	Boston, Mass. : London : Kluwer Academic, [2002]
Series:	Microsystems (Series) ; v. 8.
Subjects:	Microelectromechanical systems. Optical scanners. Optical spectrometers.