Fundamentals of microfabrication : the science of miniaturization /

Bibliographic Details
Main Author:	Madou, Marc J.
Format:	Book
Language:	English
Published:	Boca Raton, Fla. : CRC Press, [2002]
Edition:	2nd ed.
Subjects:	Microelectronics. Integrated circuits > Design and construction. Microelectromechanical systems > Design and construction. Machining. Microelectronic packaging. Lasers > Industrial applications.
Online Access:	Publisher description

Description
Physical Description:	723 pages, 16 unnumbered pages of plates : illustrations (some color) ; 29 cm.
Bibliography:	Includes bibliographical references (pages 679-684) and index.
ISBN:	0849308267 (alk. paper) 9780849308260 (alk. paper)