Fundamentals of microfabrication : the science of miniaturization /

Bibliographic Details
Main Author:	Madou, Marc J.
Format:	Book
Language:	English
Published:	Boca Raton, Fla. : CRC Press, [2002]
Edition:	2nd ed.
Subjects:	Microelectronics. Integrated circuits > Design and construction. Microelectromechanical systems > Design and construction. Machining. Microelectronic packaging. Lasers > Industrial applications.
Online Access:	Publisher description

Publisher description

Evans: Library Stacks