2001 Microelectromechanical Systems Conference : MEMS 2001 : 24-26 August 2001 Berkeley, California, USA /
| Corporate Authors: | , |
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| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Piscataway NJ :
Institute of Electrical and Electronics Engineers,
[2002]
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| Subjects: |
| Physical Description: | vii, 116 pages : illustrations ; 28 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0780372247 |